Acronyms related to SIS receiver development

  • ICP = Inductively Coupled Plasma (an etching technique)
  • SEM = Scanning Electron Microscope
  • TRL resonator = Transmission Line resonator (a method for measuring RF properties of thin films)
  • RIE = Reactive Ion Etching
  • XPS = X-ray Photoelectron Spectroscopy
  • nLOF = photoresist chemical
  • LL = Liftoff lithography?
  • NFR? resist stripper

-- ToddHunter - 2009-12-16
Topic revision: r3 - 2010-12-06, ToddHunter
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